Study of Gamma Irradiation Effect on Sol-gel Derived Lithium Borate Glassy Film Based Metal Insulator Semiconductor (mis) Structure
نویسندگان
چکیده
This work presents a structural investigation of lithium borate (LBO) thin film. Firstly, 100 nm SiO2 was grown on top of n–type Si substrate by dry oxidation. Secondly, LBO gel was prepared by sol–gel method. After it, thin film of LBO was deposited on functionally graded SiO2/Si stack by spin coating, and then Raman and infrared spectra were studied for different thickness of the LBO film. Gold dot was deposited on top of the LBO film for electrical characterization. C–V measurements were carried out on MIS structure. Finally, influence of gamma irradiation was studied to investigate the radiation hardness of the deposited film.
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